Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553425 | Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD | Jessica S. Kachian, Naomi Yoshida, Mei Chang, Andrew C. Kummel, Sang Wook Park +1 more | 2020-02-04 |
| 10373824 | CVD silicon monolayer formation method and gate oxide ALD formation on semiconductor materials | Andrew C. Kummel, Mei Chang, Jessica S. Kachian | 2019-08-06 |
| 10297441 | Low-temperature atomic layer deposition of boron nitride and BN structures | Steven Wolf, Andrew C. Kummel, Srinivas D. Nemani, Ellie Yieh | 2019-05-21 |
| 10262858 | Surface functionalization and passivation with a control layer | Naomi Yoshida, Lin Dong, Andrew C. Kummel, Jessica S. Kachian, Steve Wolf | 2019-04-16 |
| 9824889 | CVD silicon monolayer formation method and gate oxide ALD formation on III-V materials | Andrew C. Kummel, Mei Chang, Jessica S. Kachian | 2017-11-21 |
| 9773663 | Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD | Jessica S. Kachian, Naomi Yoshida, Mei Chang, Andrew C. Kummel, Sang Wook Park +1 more | 2017-09-26 |
| 9607920 | Self-limiting chemical vapor deposition and atomic layer deposition methods | Andrew C. Kummel, Atif Noori | 2017-03-28 |
| 9305780 | Self-limiting chemical vapor deposition and atomic layer deposition methods | Andrew C. Kummel, Atif Noori | 2016-04-05 |