Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11368904 | Network slice selection method and apparatus | Guangchao Zhou, Heng Chen, Zhiyong Zhou | 2022-06-21 |
| 11364627 | Joint support structure of a robot and a robot having the same | Qiang Huang, Junyao Gao, Zhangguo Yu, Huaxin Liu | 2022-06-21 |
| 11364642 | Waist joint of humanoid robot and humanoid robot | Qiang Huang, Junyao Gao, Weimin Zhang, Xuechao Chen, Dingkui Tian | 2022-06-21 |
| 11164723 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Taiki Hatakeyama, Sean S. Kang, Katsumasa Kawasaki | 2021-11-02 |
| 11127619 | Workpiece carrier for high power with enhanced edge sealing | Kartik Ramaswamy, Haitao Wang, Vijay D. Parkhe, Jaeyong Cho | 2021-09-21 |
| 10930471 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Taiki Hatakeyama, Sean S. Kang, Katsumasa Kawasaki | 2021-02-23 |
| 10930540 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2021-02-23 |
| 10854425 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2020-12-01 |
| 10784132 | Method and apparatus for de-chucking a workpiece using a swing voltage sequence | Haitao Wang, Wonseok Lee, Sergio Fukuda Shoji, Kartik Ramaswamy | 2020-09-22 |
| 10781446 | RNA nanoparticle for treatment of gastric cancer | Peixuan Guo, Daxiang Cui, Dan Shu, Yi Shu | 2020-09-22 |
| 10770270 | High power electrostatic chuck with aperture-reducing plug in a gas hole | Jaeyong Cho, Haitao Wang, Vijay D. Parkhe, Kartik Ramaswamy | 2020-09-08 |
| 10745807 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Sergio Fukuda Shoji, Kartik Ramaswamy, Roland Smith +1 more | 2020-08-18 |
| 10679783 | Network transformer apparatus and methods of making and using the same | Sheshe Zhao, Yonggang Wang | 2020-06-09 |
| 10656194 | Real-time measurement of a surface charge profile of an electrostatic chuck | Haitao Wang, Lawrence Wong, Kartik Ramaswamy | 2020-05-19 |
| 10593518 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Taiki Hatakeyama, Sean S. Kang, Katsumasa Kawasaki | 2020-03-17 |
| 10504765 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2019-12-10 |
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Phillip Criminale, Steven E. Babayan, David Ullstrom | 2019-10-08 |
| 10428456 | Steel wire rope for conveyor belt | Lihua Liu, Hongfang Liu, Yongqing Shao, Yawei Zhang, Kai Xu +1 more | 2019-10-01 |
| 10410889 | Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors | S. M. Reza Sadjadi, Haitao Wang, Jie Zhou, Tza-Jing Gung, Fernando Silveira | 2019-09-10 |
| 10378108 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Sergio Fukuda Shoji, Kartik Ramaswamy, Roland Smith +1 more | 2019-08-13 |
| 10242893 | Method and apparatus for de-chucking a workpiece using a swing voltage sequence | Haitao Wang, Wonseok Lee, Sergio Fukuda Shoji, Kartik Ramaswamy | 2019-03-26 |
| 9646843 | Tunable magnetic field to improve uniformity | Andrew Nguyen, Tza-Jing Gung, Haitao Wang, Maxim Mikhailovich Noginov, Reza Sadjadi +1 more | 2017-05-09 |
| 9359642 | Method for preparing nucleic acid library, its uses and kits | Xuyang Yin, Hui Jiang, Xiuqing Zhang, Shengpei Chen | 2016-06-07 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2016-05-10 |
| 9155134 | Methods and apparatus for rapidly responsive heat control in plasma processing devices | Richard Fovell, Ezra Robert Gold, Ajit Balakrishna, James P. Cruse | 2015-10-06 |