Issued Patents All Time
Showing 151–175 of 213 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403502 | Boron doped tungsten carbide for hardmask applications | Eswaranand Venkatasubramanian, Susmit Singha Roy, Takehito Koshizawa | 2019-09-03 |
| 10403542 | Methods of forming self-aligned vias and air gaps | Susmit Singha Roy, Ziqing Duan, Praburam Gopalraja | 2019-09-03 |
| 10354916 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Ziqing Duan, Kelvin Chan | 2019-07-16 |
| 10347488 | Titanium compound based hard mask films | Rui Cheng, Wei V. Tang, Pramit Manna, Srinivas Gandikota | 2019-07-09 |
| 10347495 | Schemes for selective deposition for patterning applications | Atashi Basu | 2019-07-09 |
| 10319591 | Geometric control of bottom-up pillars for patterning applications | Ziqing Duan | 2019-06-11 |
| 10319600 | Thermal silicon etch | Zihui Li, Rui Cheng, Anchuan Wang, Nitin K. Ingle | 2019-06-11 |
| 10319604 | Methods for self-aligned patterning | Ziqing Duan, Yihong Chen, Srinivas Gandikota | 2019-06-11 |
| 10319624 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Kelvin Chan, Srinivas Gandikota, Pramit Manna | 2019-06-11 |
| 10319636 | Deposition and treatment of films for patterning | Atashi Basu, Ziqing Duan, Srinivas Gandikota | 2019-06-11 |
| 10312137 | Hardmask layer for 3D NAND staircase structure in semiconductor applications | Eswaranand Venkatasubramanian, Susmit Singha Roy, Pramit Manna | 2019-06-04 |
| 10280507 | Flowable gapfill using solvents | Ranga Rao Arnepalli, Darshan Thakare, Pramit Manna, Robert Jan Visser, Prerna Goradia +1 more | 2019-05-07 |
| 10276379 | Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide | Rui Cheng, Yihong Chen | 2019-04-30 |
| 10236197 | Processing system containing an isolation region separating a deposition chamber from a treatment chamber | Karthik Janakiraman, Hari Ponnekanti, Mandyam Sriram, Alexandros T. Demos, Mukund Srinivasan +2 more | 2019-03-19 |
| 10192775 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan +1 more | 2019-01-29 |
| 10176980 | Selective deposition of silicon oxide films | Pramit Manna | 2019-01-08 |
| 10128150 | Process of filling the high aspect ratio trenches by co-flowing ligands during thermal CVD | Pramit Manna, Rui Cheng, Kelvin Chan | 2018-11-13 |
| 10083834 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Susmit Singha Roy, Ziqing Duan | 2018-09-25 |
| 10017856 | Flowable gapfill using solvents | Ranga Rao Arnepalli, Darshan Thakare, Pramit Manna, Robert Jan Visser, Prerna Goradia +1 more | 2018-07-10 |
| 10002757 | Selectively lateral growth of silicon oxide thin film | Yihong Chen, Kelvin Chan, Shaunak Mukherjee | 2018-06-19 |
| 9991118 | Hybrid carbon hardmask for lateral hardmask recess reduction | Thomas Jongwan Kwon, Rui Cheng, Er-Xuan Ping, Jaesoo Ahn | 2018-06-05 |
| 9947576 | UV-assisted material injection into porous films | Brian Saxton Underwood | 2018-04-17 |
| 9865459 | Plasma treatment to improve adhesion between hardmask film and silicon oxide film | Rui Cheng, Pramit Manna | 2018-01-09 |
| 9840777 | Apparatus for radical-based deposition of dielectric films | Jianhua Zhou, Juan Carlos Rocha-Alvarez, Yihong Chen, Oscar Lopez, Ningli Liu | 2017-12-12 |
| 9741558 | Selectively lateral growth of silicon oxide thin film | Yihong Chen, Kelvin Chan, Shaunak Mukherjee | 2017-08-22 |