Issued Patents 2021
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189529 | Methods of forming metal chalcogenide pillars | Amrita B. Mullick | 2021-11-30 |
| 11177164 | Self-aligned high aspect ratio structures and methods of making | Susmit Singha Roy, Praburam Gopalraja, Abhijit Basu Mallick | 2021-11-16 |
| 11171047 | Fluorine-doped nitride films for improved high-k reliability | Yixiong Yang, Steven C. H. Hung, Jacqueline S. Wrench, Yongjing Lin, Susmit Singha Roy +2 more | 2021-11-09 |
| 11158507 | In-situ high power implant to relieve stress of a thin film | Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick | 2021-10-26 |
| 11101128 | Methods for gapfill in substrates | Yixiong Yang, Wei Liu, Yuan-hui LO, Jacqueline S. Wrench, Yongjing Lin +2 more | 2021-08-24 |
| 11094533 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Kelvin Chan, Atashi Basu, Abhijit Basu Mallick | 2021-08-17 |
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2021-08-17 |
| 11066743 | Selective atomic layer deposition of ruthenium | Yihong Chen, Yong Wu, Abhijit Basu Mallick | 2021-07-20 |
| 11069568 | Ultra-thin diffusion barriers | Susmit Singha Roy, Yihong Chen, Abhijit Basu Mallick | 2021-07-20 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Joseph Yudovsky +1 more | 2021-06-22 |
| 11043372 | High-density low temperature carbon films for hardmask and other patterning applications | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Yang Yang, Pramit Manna, Kartik Ramaswamy +2 more | 2021-06-22 |
| 10998195 | Metal and metal-derived films | Susmit Singha Roy, Yingli Rao | 2021-05-04 |
| 10991586 | In-situ tungsten deposition without barrier layer | Yong Wu, Wei V. Tang, Jianqiu GUO, Wenyi Liu, Yixiong Yang +3 more | 2021-04-27 |
| 10985023 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson +1 more | 2021-04-20 |
| 10950498 | Selective and self-limiting tungsten etch process | Susmit Singha Roy, Pramit Manna, Abhijit Basu Mallick | 2021-03-16 |
| 10930493 | Linerless continuous amorphous metal films | Susmit Singha Roy, Yong Wu | 2021-02-23 |
| 10916505 | Graphene diffusion barrier | Yong Wu, Abhijit Basu Mallick, Srinivas D. Nemani | 2021-02-09 |