| 11189529 |
Methods of forming metal chalcogenide pillars |
Amrita B. Mullick |
2021-11-30 |
| 11177164 |
Self-aligned high aspect ratio structures and methods of making |
Susmit Singha Roy, Praburam Gopalraja, Abhijit Basu Mallick |
2021-11-16 |
| 11171047 |
Fluorine-doped nitride films for improved high-k reliability |
Yixiong Yang, Steven C. H. Hung, Jacqueline S. Wrench, Yongjing Lin, Susmit Singha Roy +2 more |
2021-11-09 |
| 11158507 |
In-situ high power implant to relieve stress of a thin film |
Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick |
2021-10-26 |
| 11101128 |
Methods for gapfill in substrates |
Yixiong Yang, Wei Liu, Yuan-hui LO, Jacqueline S. Wrench, Yongjing Lin +2 more |
2021-08-24 |
| 11094533 |
Doped and undoped vanadium oxides for low-k spacer applications |
Eswaranand Venkatasubramanian, Kelvin Chan, Atashi Basu, Abhijit Basu Mallick |
2021-08-17 |
| 11094544 |
Methods of forming self-aligned vias |
David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more |
2021-08-17 |
| 11066743 |
Selective atomic layer deposition of ruthenium |
Yihong Chen, Yong Wu, Abhijit Basu Mallick |
2021-07-20 |
| 11069568 |
Ultra-thin diffusion barriers |
Susmit Singha Roy, Yihong Chen, Abhijit Basu Mallick |
2021-07-20 |
| 11043386 |
Enhanced spatial ALD of metals through controlled precursor mixing |
Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Joseph Yudovsky +1 more |
2021-06-22 |
| 11043372 |
High-density low temperature carbon films for hardmask and other patterning applications |
Eswaranand Venkatasubramanian, Samuel E. Gottheim, Yang Yang, Pramit Manna, Kartik Ramaswamy +2 more |
2021-06-22 |
| 10998195 |
Metal and metal-derived films |
Susmit Singha Roy, Yingli Rao |
2021-05-04 |
| 10991586 |
In-situ tungsten deposition without barrier layer |
Yong Wu, Wei V. Tang, Jianqiu GUO, Wenyi Liu, Yixiong Yang +3 more |
2021-04-27 |
| 10985023 |
Methods for depositing fluorine/carbon-free conformal tungsten |
Xinyu Fu, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson +1 more |
2021-04-20 |
| 10950498 |
Selective and self-limiting tungsten etch process |
Susmit Singha Roy, Pramit Manna, Abhijit Basu Mallick |
2021-03-16 |
| 10930493 |
Linerless continuous amorphous metal films |
Susmit Singha Roy, Yong Wu |
2021-02-23 |
| 10916505 |
Graphene diffusion barrier |
Yong Wu, Abhijit Basu Mallick, Srinivas D. Nemani |
2021-02-09 |
