Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158507 | In-situ high power implant to relieve stress of a thin film | Pramit Manna, Abhijit Basu Mallick, Srinivas Gandikota | 2021-10-26 |
| 11094533 | Doped and undoped vanadium oxides for low-k spacer applications | Srinivas Gandikota, Kelvin Chan, Atashi Basu, Abhijit Basu Mallick | 2021-08-17 |
| 11062939 | High bias deposition of high quality gapfill | Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick | 2021-07-13 |
| 11043375 | Plasma deposition of carbon hardmask | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Gonzalo Monroy +2 more | 2021-06-22 |
| 11043372 | High-density low temperature carbon films for hardmask and other patterning applications | Samuel E. Gottheim, Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa +2 more | 2021-06-22 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Mark Saly, Keiichi Tanaka, Mandyam Sriram, Bhaskar Jyoti Bhuyan, Pramit Manna +2 more | 2021-06-08 |
| 10954129 | Diamond-like carbon as mandrel | Takehito Koshizawa, Pramit Manna, Chi-Pin Lu, Chi-I Lang, Nancy Fung +1 more | 2021-03-23 |
| 10910381 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2021-02-02 |