Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094533 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Srinivas Gandikota, Kelvin Chan, Abhijit Basu Mallick | 2021-08-17 |
| 11078224 | Precursors for the atomic layer deposition of transition metals and methods of use | Jeffrey W. Anthis | 2021-08-03 |
| 11049722 | Methods and materials for modifying the threshold voltage of metal oxide stacks | Siddarth A. Krishnan, Rajesh Sathiyanarayanan, Paul F. Ma | 2021-06-29 |
| 10977405 | Fill process optimization using feature scale modeling | Michael J. Bowes, Kapil Sawlani, Dongyao Li, Anand Chandrashekar, David M. Fried +1 more | 2021-04-13 |