| 11174551 |
Methods for depositing tungsten on halosilane based metal silicide nucleation layers |
Yihong Chen |
2021-11-16 |
| 11094533 |
Doped and undoped vanadium oxides for low-k spacer applications |
Eswaranand Venkatasubramanian, Srinivas Gandikota, Atashi Basu, Abhijit Basu Mallick |
2021-08-17 |
| 11094544 |
Methods of forming self-aligned vias |
David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more |
2021-08-17 |
| 11043386 |
Enhanced spatial ALD of metals through controlled precursor mixing |
Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota, Joseph Yudovsky +1 more |
2021-06-22 |
| 10985009 |
Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources |
Lakmal C. Kalutarage, Mark Saly, David Thompson, William J. Durand, Hanhong Chen +1 more |
2021-04-20 |
| 10886172 |
Methods for wordline separation in 3D-NAND devices |
Yihong Chen, Ziqing Duan, Abhijit Basu Mallick |
2021-01-05 |
