Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11174551 | Methods for depositing tungsten on halosilane based metal silicide nucleation layers | Yihong Chen | 2021-11-16 |
| 11094533 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Srinivas Gandikota, Atashi Basu, Abhijit Basu Mallick | 2021-08-17 |
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2021-08-17 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota, Joseph Yudovsky +1 more | 2021-06-22 |
| 10985009 | Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources | Lakmal C. Kalutarage, Mark Saly, David Thompson, William J. Durand, Hanhong Chen +1 more | 2021-04-20 |
| 10886172 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Ziqing Duan, Abhijit Basu Mallick | 2021-01-05 |