Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177174 | Selective deposition of carbon films and uses thereof | Abhijit Basu Mallick | 2021-11-16 |
| 11177164 | Self-aligned high aspect ratio structures and methods of making | Praburam Gopalraja, Abhijit Basu Mallick, Srinivas Gandikota | 2021-11-16 |
| 11171047 | Fluorine-doped nitride films for improved high-k reliability | Yixiong Yang, Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Yongjing Lin +2 more | 2021-11-09 |
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Ziqing Duan +3 more | 2021-08-17 |
| 11069568 | Ultra-thin diffusion barriers | Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota | 2021-07-20 |
| 10998195 | Metal and metal-derived films | Yingli Rao, Srinivas Gandikota | 2021-05-04 |
| 10950498 | Selective and self-limiting tungsten etch process | Srinivas Gandikota, Pramit Manna, Abhijit Basu Mallick | 2021-03-16 |
| 10930493 | Linerless continuous amorphous metal films | Yong Wu, Srinivas Gandikota | 2021-02-23 |