| 11177174 |
Selective deposition of carbon films and uses thereof |
Abhijit Basu Mallick |
2021-11-16 |
| 11177164 |
Self-aligned high aspect ratio structures and methods of making |
Praburam Gopalraja, Abhijit Basu Mallick, Srinivas Gandikota |
2021-11-16 |
| 11171047 |
Fluorine-doped nitride films for improved high-k reliability |
Yixiong Yang, Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Yongjing Lin +2 more |
2021-11-09 |
| 11094544 |
Methods of forming self-aligned vias |
David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Ziqing Duan +3 more |
2021-08-17 |
| 11069568 |
Ultra-thin diffusion barriers |
Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota |
2021-07-20 |
| 10998195 |
Metal and metal-derived films |
Yingli Rao, Srinivas Gandikota |
2021-05-04 |
| 10950498 |
Selective and self-limiting tungsten etch process |
Srinivas Gandikota, Pramit Manna, Abhijit Basu Mallick |
2021-03-16 |
| 10930493 |
Linerless continuous amorphous metal films |
Yong Wu, Srinivas Gandikota |
2021-02-23 |