Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171047 | Fluorine-doped nitride films for improved high-k reliability | Yixiong Yang, Srinivas Gandikota, Steven C. H. Hung, Yongjing Lin, Susmit Singha Roy +2 more | 2021-11-09 |
| 11101128 | Methods for gapfill in substrates | Yixiong Yang, Wei Liu, Yuan-hui LO, Srinivas Gandikota, Yongjing Lin +2 more | 2021-08-24 |
| 10991586 | In-situ tungsten deposition without barrier layer | Yong Wu, Wei V. Tang, Jianqiu GUO, Wenyi Liu, Yixiong Yang +3 more | 2021-04-27 |