Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171047 | Fluorine-doped nitride films for improved high-k reliability | Yixiong Yang, Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Susmit Singha Roy +2 more | 2021-11-09 |
| 11101128 | Methods for gapfill in substrates | Yixiong Yang, Wei Liu, Yuan-hui LO, Srinivas Gandikota, Jacqueline S. Wrench +2 more | 2021-08-24 |
| 11075276 | Methods and apparatus for n-type metal oxide semiconductor (NMOS) metal gate materials using atomic layer deposition (ALD) processes with metal based precursors | Shih Chung Chen, Naomi Yoshida, Lin Dong, Liqi Wu, Rongjun Wang +5 more | 2021-07-27 |