Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2021-08-17 |
| 11011371 | SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material | Milind Gadre, Shaunak Mukherjee, Praket P. Jha, Deenesh Padhi, Abhijit Basu Mallick | 2021-05-18 |
| 10971364 | Ultra-high modulus and etch selectivity boron carbon hardmask films | Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2021-04-06 |
| 10930475 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Prashant Kumar Kulshreshtha, Abdul Aziz Khaja, Zheng John Ye, Amit Kumar BANSAL | 2021-02-23 |
| 10930503 | Geometric control of bottom-up pillars for patterning applications | Abhijit Basu Mallick | 2021-02-23 |
| 10886172 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Abhijit Basu Mallick, Kelvin Chan | 2021-01-05 |