Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 10971364 | Ultra-high modulus and etch selectivity boron carbon hardmask films | Prashant Kumar Kulshreshtha, Ziqing Duan, Karthik Thimmavajjula Narasimha, Bok Hoen Kim | 2021-04-06 |
| 10950445 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Jiarui Wang, Milind Gadre, Xiaoquan Min, Paul Connors | 2021-03-16 |
| 10923334 | Selective deposition of hardmask | Satya THOKACHICHU, Edward P. Hammond, IV, Viren Kalsekar, Zheng John Ye, Sarah Michelle Bobek +4 more | 2021-02-16 |