Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more | 2021-06-08 |
| 10903066 | Heater support kit for bevel etch chamber | Tuan Nguyen, Anjana M. Patel, Abdul Aziz Khaja | 2021-01-26 |