Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133210 | Dual temperature heater | Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Ganesh Balasubramanian, Lipyeow Yap, Jianhua Zhou +1 more | 2021-09-28 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more | 2021-06-08 |
| 11004663 | Chamber design for semiconductor processing | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL | 2021-05-11 |