Issued Patents 2021
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139168 | Chamber deposition and etch process | Jun Ma, Tuan Nguyen | 2021-10-05 |
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Mohamad A. Ayoub, Robert W. Kim, Mark Fodor, Binh Nguyen +6 more | 2021-10-05 |
| 11107704 | Gas input system for a substrate processing chamber | Tejas Ulavi, Thuy Britcher | 2021-08-31 |
| 11078568 | Pumping apparatus and method for substrate processing chambers | Kalyanjit Ghosh, David Blahnik, Tuan Nguyen | 2021-08-03 |
| 11080617 | Preservation of causal information for machine learning | Thomas Rosati, Tittu Thomas Nellimoottil | 2021-08-03 |
| 11049699 | Gas box for CVD chamber | Tejas Ulavi, Nitin Pathak, Ajit Balakrishna | 2021-06-29 |
| 11004663 | Chamber design for semiconductor processing | Juan Carlos Rocha-Alvarez, Dale R. Du Bois | 2021-05-11 |
| 10930475 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Prashant Kumar Kulshreshtha, Ziqing Duan, Abdul Aziz Khaja, Zheng John Ye | 2021-02-23 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Matthew J. Busche, Juan Carlos Rocha-Alvarez +3 more | 2021-02-02 |
| 10910227 | Bottom and side plasma tuning having closed loop control | Juan Carlos Rocha-Alvarez, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan, Mohamad A. Ayoub +1 more | 2021-02-02 |
| 10889894 | Faceplate with embedded heater | Daniel HWUNG, Yuxing Zhang, Kalyanjit Ghosh, Kaushik Alayavalli | 2021-01-12 |