Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor, Binh Nguyen +6 more | 2021-10-05 |
| 10916407 | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates | Abdul Aziz Khaja, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez | 2021-02-09 |
| 10910227 | Bottom and side plasma tuning having closed loop control | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan +1 more | 2021-02-02 |