Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10984990 | Electrode assembly | Ramesh Bokka, Jason M. Schaller, Luke Bonecutter | 2021-04-20 |
| 10934620 | Integration of dual remote plasmas sources for flowable CVD | Ying Ma, Daemian Raj, Dongqing Li, Jingmei Liang, Yizhen Zhang | 2021-03-02 |
| 10916407 | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates | Abdul Aziz Khaja, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez | 2021-02-09 |