Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170994 | CD dependent gap fill and conformal films | Jung Chan Lee, Praket P. Jha, Jinrui GUO, Wenhui Li | 2021-11-09 |
| 11170990 | Polysilicon liners | Krishna Nittala, Rui Cheng, Karthik Janakiraman, Praket P. Jha, Jinrui GUO | 2021-11-09 |
| 11152248 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Yong Sun, Jinrui GUO, Praket P. Jha, Jung Chan Lee, Tza-Jing Gung +1 more | 2021-10-19 |
| 11133177 | Oxidation reduction for SiOC film | Martin Jay Seamons, Michael Wenyoung Tsiang | 2021-09-28 |
| 11107674 | Methods for depositing silicon nitride | Lakmal C. Kalutarage, Mark Saly, Praket P. Jha | 2021-08-31 |
| 11090683 | Cure method for cross-linking Si-hydroxyl bonds | Martin Jay Seamons, Byung Kook Ahn | 2021-08-17 |
| 10934620 | Integration of dual remote plasmas sources for flowable CVD | Ying Ma, Daemian Raj, Jay D. Pinson, II, Dongqing Li, Yizhen Zhang | 2021-03-02 |