Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152248 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Jingmei Liang, Jinrui GUO, Praket P. Jha, Jung Chan Lee, Tza-Jing Gung +1 more | 2021-10-19 |
| 11120977 | Conductive oxide-coated electrodes via nano- or micro-structured materials | Chloe Astrid Marie Fabien, Max N. Mankin, Tony S. Pan | 2021-09-14 |