Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133177 | Oxidation reduction for SiOC film | Martin Jay Seamons, Jingmei Liang | 2021-09-28 |
| 11060189 | Method to enable high temperature processing without chamber drifting | Praket P. Jha, Deenesh Padhi | 2021-07-13 |