Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11157661 | Process development visualization tool | Vinayak Veer Vats, Sidharth Bhatia, Garrett H. Sin, Pramod Nambiar, Hang Yu +2 more | 2021-10-26 |
| 11145504 | Method of forming film stacks with reduced defects | Zhijun Jiang, Ganesh Balasubramanian, Arkajit Roy Barman, Hidehiro Kojiri, Xinhai Han +8 more | 2021-10-12 |
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2021-10-05 |
| 11060189 | Method to enable high temperature processing without chamber drifting | Michael Wenyoung Tsiang, Praket P. Jha | 2021-07-13 |
| 11011371 | SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material | Milind Gadre, Shaunak Mukherjee, Praket P. Jha, Ziqing Duan, Abhijit Basu Mallick | 2021-05-18 |
| 10950430 | Pulsed plasma deposition etch step coverage improvement | Vinayak Veer Vats, Hang Yu, Changling Li, Gregory M. Amico, Sanjay Kamath | 2021-03-16 |