Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011371 | SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material | Shaunak Mukherjee, Praket P. Jha, Deenesh Padhi, Ziqing Duan, Abhijit Basu Mallick | 2021-05-18 |
| 10950445 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Jiarui Wang, Kwangduk Douglas Lee, Xiaoquan Min, Paul Connors | 2021-03-16 |