Issued Patents 2021
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177174 | Selective deposition of carbon films and uses thereof | Susmit Singha Roy | 2021-11-16 |
| 11177164 | Self-aligned high aspect ratio structures and methods of making | Susmit Singha Roy, Praburam Gopalraja, Srinivas Gandikota | 2021-11-16 |
| 11177128 | Apparatus and methods for manufacturing semiconductor structures using protective barrier layer | Pramit Manna, Kurtis Leschkies, Steven Verhaverbeke, Shishi Jiang | 2021-11-16 |
| 11158507 | In-situ high power implant to relieve stress of a thin film | Eswaranand Venkatasubramanian, Pramit Manna, Srinivas Gandikota | 2021-10-26 |
| 11131015 | High pressure oxidation of metal films | Amrita B. Mullick, Pramit Manna | 2021-09-28 |
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Susmit Singha Roy, Ziqing Duan +3 more | 2021-08-17 |
| 11094533 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Srinivas Gandikota, Kelvin Chan, Atashi Basu | 2021-08-17 |
| 11081348 | Selective deposition of silicon using deposition-treat-etch process | Rui Cheng, Fei Wang, Robert Jan Visser | 2021-08-03 |
| 11069568 | Ultra-thin diffusion barriers | Susmit Singha Roy, Yihong Chen, Srinivas Gandikota | 2021-07-20 |
| 11066743 | Selective atomic layer deposition of ruthenium | Yihong Chen, Yong Wu, Srinivas Gandikota | 2021-07-20 |
| 11062939 | High bias deposition of high quality gapfill | Samuel E. Gottheim, Eswaranand Venkatasubramanian, Pramit Manna | 2021-07-13 |
| 11043379 | Conformal carbon film deposition | Pramit Manna | 2021-06-22 |
| 11043372 | High-density low temperature carbon films for hardmask and other patterning applications | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Yang Yang, Pramit Manna, Kartik Ramaswamy +2 more | 2021-06-22 |
| 11011371 | SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material | Milind Gadre, Shaunak Mukherjee, Praket P. Jha, Deenesh Padhi, Ziqing Duan | 2021-05-18 |
| 11011384 | Gapfill using reactive anneal | Pramit Manna, Shishi Jiang | 2021-05-18 |
| 11004689 | Thermal silicon etch | Zihui Li, Rui Cheng, Anchuan Wang, Nitin K. Ingle | 2021-05-11 |
| 10954129 | Diamond-like carbon as mandrel | Takehito Koshizawa, Eswaranand Venkatasubramanian, Pramit Manna, Chi-Pin Lu, Chi-I Lang +1 more | 2021-03-23 |
| 10950498 | Selective and self-limiting tungsten etch process | Susmit Singha Roy, Srinivas Gandikota, Pramit Manna | 2021-03-16 |
| 10950450 | Silicide films through selective deposition | Swaminathan Srinivasan, Nicolas L. Breil | 2021-03-16 |
| 10930503 | Geometric control of bottom-up pillars for patterning applications | Ziqing Duan | 2021-02-23 |
| 10916505 | Graphene diffusion barrier | Yong Wu, Srinivas Gandikota, Srinivas D. Nemani | 2021-02-09 |
| 10910381 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Pramit Manna, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2021-02-02 |
| 10886172 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Ziqing Duan, Kelvin Chan | 2021-01-05 |
| 10886140 | 3D NAND etch | Shishi Jiang, Pramit Manna, Bo Qi, Rui Cheng, Tomohiko Kitajima +2 more | 2021-01-05 |