| 11177174 |
Selective deposition of carbon films and uses thereof |
Susmit Singha Roy |
2021-11-16 |
| 11177164 |
Self-aligned high aspect ratio structures and methods of making |
Susmit Singha Roy, Praburam Gopalraja, Srinivas Gandikota |
2021-11-16 |
| 11177128 |
Apparatus and methods for manufacturing semiconductor structures using protective barrier layer |
Pramit Manna, Kurtis Leschkies, Steven Verhaverbeke, Shishi Jiang |
2021-11-16 |
| 11158507 |
In-situ high power implant to relieve stress of a thin film |
Eswaranand Venkatasubramanian, Pramit Manna, Srinivas Gandikota |
2021-10-26 |
| 11131015 |
High pressure oxidation of metal films |
Amrita B. Mullick, Pramit Manna |
2021-09-28 |
| 11094544 |
Methods of forming self-aligned vias |
David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Susmit Singha Roy, Ziqing Duan +3 more |
2021-08-17 |
| 11094533 |
Doped and undoped vanadium oxides for low-k spacer applications |
Eswaranand Venkatasubramanian, Srinivas Gandikota, Kelvin Chan, Atashi Basu |
2021-08-17 |
| 11081348 |
Selective deposition of silicon using deposition-treat-etch process |
Rui Cheng, Fei Wang, Robert Jan Visser |
2021-08-03 |
| 11069568 |
Ultra-thin diffusion barriers |
Susmit Singha Roy, Yihong Chen, Srinivas Gandikota |
2021-07-20 |
| 11066743 |
Selective atomic layer deposition of ruthenium |
Yihong Chen, Yong Wu, Srinivas Gandikota |
2021-07-20 |
| 11062939 |
High bias deposition of high quality gapfill |
Samuel E. Gottheim, Eswaranand Venkatasubramanian, Pramit Manna |
2021-07-13 |
| 11043379 |
Conformal carbon film deposition |
Pramit Manna |
2021-06-22 |
| 11043372 |
High-density low temperature carbon films for hardmask and other patterning applications |
Eswaranand Venkatasubramanian, Samuel E. Gottheim, Yang Yang, Pramit Manna, Kartik Ramaswamy +2 more |
2021-06-22 |
| 11011371 |
SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material |
Milind Gadre, Shaunak Mukherjee, Praket P. Jha, Deenesh Padhi, Ziqing Duan |
2021-05-18 |
| 11011384 |
Gapfill using reactive anneal |
Pramit Manna, Shishi Jiang |
2021-05-18 |
| 11004689 |
Thermal silicon etch |
Zihui Li, Rui Cheng, Anchuan Wang, Nitin K. Ingle |
2021-05-11 |
| 10954129 |
Diamond-like carbon as mandrel |
Takehito Koshizawa, Eswaranand Venkatasubramanian, Pramit Manna, Chi-Pin Lu, Chi-I Lang +1 more |
2021-03-23 |
| 10950498 |
Selective and self-limiting tungsten etch process |
Susmit Singha Roy, Srinivas Gandikota, Pramit Manna |
2021-03-16 |
| 10950450 |
Silicide films through selective deposition |
Swaminathan Srinivasan, Nicolas L. Breil |
2021-03-16 |
| 10930503 |
Geometric control of bottom-up pillars for patterning applications |
Ziqing Duan |
2021-02-23 |
| 10916505 |
Graphene diffusion barrier |
Yong Wu, Srinivas Gandikota, Srinivas D. Nemani |
2021-02-09 |
| 10910381 |
Multicolor approach to DRAM STI active cut patterning |
Tejinder Singh, Takehito Koshizawa, Pramit Manna, Nancy Fung, Eswaranand Venkatasubramanian +2 more |
2021-02-02 |
| 10886172 |
Methods for wordline separation in 3D-NAND devices |
Yihong Chen, Ziqing Duan, Kelvin Chan |
2021-01-05 |
| 10886140 |
3D NAND etch |
Shishi Jiang, Pramit Manna, Bo Qi, Rui Cheng, Tomohiko Kitajima +2 more |
2021-01-05 |
