Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094544 | Methods of forming self-aligned vias | David Thompson, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan +3 more | 2021-08-17 |
| 10906925 | Ruthenium precursors for ALD and CVD thin film deposition and uses thereof | Jeffrey W. Anthis, David Thompson | 2021-02-02 |