Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan +3 more | 2021-08-17 |
| 11078224 | Precursors for the atomic layer deposition of transition metals and methods of use | Atashi Basu | 2021-08-03 |
| 10906925 | Ruthenium precursors for ALD and CVD thin film deposition and uses thereof | Benjamin Schmiege, David Thompson | 2021-02-02 |