Issued Patents 2021
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177128 | Apparatus and methods for manufacturing semiconductor structures using protective barrier layer | Abhijit Basu Mallick, Kurtis Leschkies, Steven Verhaverbeke, Shishi Jiang | 2021-11-16 |
| 11158507 | In-situ high power implant to relieve stress of a thin film | Eswaranand Venkatasubramanian, Abhijit Basu Mallick, Srinivas Gandikota | 2021-10-26 |
| 11131015 | High pressure oxidation of metal films | Amrita B. Mullick, Abhijit Basu Mallick | 2021-09-28 |
| 11062939 | High bias deposition of high quality gapfill | Samuel E. Gottheim, Eswaranand Venkatasubramanian, Abhijit Basu Mallick | 2021-07-13 |
| 11043372 | High-density low temperature carbon films for hardmask and other patterning applications | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Yang Yang, Kartik Ramaswamy, Takehito Koshizawa +2 more | 2021-06-22 |
| 11043379 | Conformal carbon film deposition | Abhijit Basu Mallick | 2021-06-22 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Mark Saly, Keiichi Tanaka, Eswaranand Venkatasubramanian, Mandyam Sriram, Bhaskar Jyoti Bhuyan +2 more | 2021-06-08 |
| 11011384 | Gapfill using reactive anneal | Abhijit Basu Mallick, Shishi Jiang | 2021-05-18 |
| 10954129 | Diamond-like carbon as mandrel | Takehito Koshizawa, Eswaranand Venkatasubramanian, Chi-Pin Lu, Chi-I Lang, Nancy Fung +1 more | 2021-03-23 |
| 10950498 | Selective and self-limiting tungsten etch process | Susmit Singha Roy, Srinivas Gandikota, Abhijit Basu Mallick | 2021-03-16 |
| 10910381 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2021-02-02 |
| 10886140 | 3D NAND etch | Shishi Jiang, Bo Qi, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more | 2021-01-05 |