Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145509 | Method for forming and patterning a layer and/or substrate | Rui Cheng, Tejinder Singh, Hidetaka Oshio | 2021-10-12 |
| 11043372 | High-density low temperature carbon films for hardmask and other patterning applications | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Yang Yang, Pramit Manna, Kartik Ramaswamy +2 more | 2021-06-22 |
| 10998329 | Methods and apparatus for three dimensional NAND structure fabrication | Mukund Srinivasan, Tomohiko Kitajima, Chang-Seok Kang, Sung-Kwan Kang, Gill Yong Lee +1 more | 2021-05-04 |
| 10954129 | Diamond-like carbon as mandrel | Eswaranand Venkatasubramanian, Pramit Manna, Chi-Pin Lu, Chi-I Lang, Nancy Fung +1 more | 2021-03-23 |
| 10910381 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Abhijit Basu Mallick, Pramit Manna, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2021-02-02 |