Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062939 | High bias deposition of high quality gapfill | Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick | 2021-07-13 |
| 11043372 | High-density low temperature carbon films for hardmask and other patterning applications | Eswaranand Venkatasubramanian, Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa +2 more | 2021-06-22 |
| 10910381 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2021-02-02 |