Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170990 | Polysilicon liners | Krishna Nittala, Karthik Janakiraman, Praket P. Jha, Jinrui GUO, Jingmei Liang | 2021-11-09 |
| 11145509 | Method for forming and patterning a layer and/or substrate | Takehito Koshizawa, Tejinder Singh, Hidetaka Oshio | 2021-10-12 |
| 11081348 | Selective deposition of silicon using deposition-treat-etch process | Fei Wang, Abhijit Basu Mallick, Robert Jan Visser | 2021-08-03 |
| 11004689 | Thermal silicon etch | Zihui Li, Anchuan Wang, Nitin K. Ingle, Abhijit Basu Mallick | 2021-05-11 |
| 10886140 | 3D NAND etch | Shishi Jiang, Pramit Manna, Bo Qi, Abhijit Basu Mallick, Tomohiko Kitajima +2 more | 2021-01-05 |