Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211286 | Airgap formation processes | Ashish Pal, Gaurav Thareja, Sankuei Lin, Ching-Mei Hsu, Nitin K. Ingle +1 more | 2021-12-28 |
| 11062921 | Systems and methods for aluminum-containing film removal | Zhenjiang Cui, Rohan Puligoru Reddy, Xiaolin Chen | 2021-07-13 |
| 11004687 | Gate contact over active processes | Gaurav Thareja, Keyvan Kashefizadeh, Xikun Wang, Sanjay Natarajan, Sean M. Seutter +1 more | 2021-05-11 |
| 11004689 | Thermal silicon etch | Zihui Li, Rui Cheng, Nitin K. Ingle, Abhijit Basu Mallick | 2021-05-11 |