Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121002 | Systems and methods for etching metals and metal derivatives | Hanshen Zhang, Siliang Chang, Daniella Holm | 2021-09-14 |
| 11062921 | Systems and methods for aluminum-containing film removal | Anchuan Wang, Rohan Puligoru Reddy, Xiaolin Chen | 2021-07-13 |