Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11062887 | High temperature RF heater pedestals | Soonam Park, David Benjaminson, Dmitry Lubomirsky | 2021-07-13 | $86,517,000 |
| 11024537 | Methods and apparatus for hybrid feature metallization | Roey Shaviv, Ismail Emesh | 2021-06-01 | $74,932,000 |
| 11004687 | Gate contact over active processes | Gaurav Thareja, Keyvan Kashefizadeh, Anchuan Wang, Sanjay Natarajan, Sean M. Seutter +1 more | 2021-05-11 | $77,987,000 |
| 10950500 | Methods and apparatus for filling a feature disposed in a substrate | Roey Shaviv, Ismail Emesh, Jianxin Lei, Wenting Hou | 2021-03-16 | $56,717,000 |