Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114320 | Processing system and method of forming a contact | Gaurav Thareja, Takashi Kuratomi, Avgerinos V. Gelatos, Xianmin Tang, Sanjay Natarajan +3 more | 2021-09-07 |
| 10950500 | Methods and apparatus for filling a feature disposed in a substrate | Roey Shaviv, Xikun Wang, Ismail Emesh, Wenting Hou | 2021-03-16 |
| 10903112 | Methods and apparatus for smoothing dynamic random access memory bit line metal | Priyadarshi Panda, Sanjay Natarajan, In-Seok Hwang, Nobuyuki Sasaki | 2021-01-26 |