| 11171045 |
Deposition of metal films with tungsten liner |
Yu Lei, Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha +1 more |
2021-11-09 |
| 11114320 |
Processing system and method of forming a contact |
Gaurav Thareja, Takashi Kuratomi, Avgerinos V. Gelatos, Sanjay Natarajan, Keyvan Kashefizadeh +3 more |
2021-09-07 |
| 11056325 |
Methods and apparatus for substrate edge uniformity |
Thanh X. Nguyen, Alexander Jansen, Yana Cheng, Randal Dean Schmieding, Yong Cao +1 more |
2021-07-06 |
| 11037768 |
Methods and apparatus for controlling ion fraction in physical vapor deposition processes |
Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more |
2021-06-15 |
| 11011676 |
PVD buffer layers for LED fabrication |
Mingwei Zhu, Rongjun Wang, Nag B. Patibandla, Vivek Agrawal, Cheng-Hsiung Tsai +5 more |
2021-05-18 |
| 10950448 |
Film quality control in a linear scan physical vapor deposition process |
Bencherki Mebarki, Joung Joo Lee |
2021-03-16 |
| 10927450 |
Methods and apparatus for patterning substrates using asymmetric physical vapor deposition |
Bencherki Mebarki, Wenhui Wang, Huixiong Dai, Christopher S. Ngai, Joung Joo Lee |
2021-02-23 |
| 10927451 |
Methods and apparatus for patterning substrates using asymmetric physical vapor deposition |
Bencherki Mebarki, Byeong-Chan Lee, Huixiong Dai, Tejinder Singh, Joung Joo Lee |
2021-02-23 |
