Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171045 | Deposition of metal films with tungsten liner | Yu Lei, Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha +1 more | 2021-11-09 |
| 11114320 | Processing system and method of forming a contact | Gaurav Thareja, Takashi Kuratomi, Avgerinos V. Gelatos, Sanjay Natarajan, Keyvan Kashefizadeh +3 more | 2021-09-07 |
| 11056325 | Methods and apparatus for substrate edge uniformity | Thanh X. Nguyen, Alexander Jansen, Yana Cheng, Randal Dean Schmieding, Yong Cao +1 more | 2021-07-06 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2021-06-15 |
| 11011676 | PVD buffer layers for LED fabrication | Mingwei Zhu, Rongjun Wang, Nag B. Patibandla, Vivek Agrawal, Cheng-Hsiung Tsai +5 more | 2021-05-18 |
| 10950448 | Film quality control in a linear scan physical vapor deposition process | Bencherki Mebarki, Joung Joo Lee | 2021-03-16 |
| 10927450 | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition | Bencherki Mebarki, Wenhui Wang, Huixiong Dai, Christopher S. Ngai, Joung Joo Lee | 2021-02-23 |
| 10927451 | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition | Bencherki Mebarki, Byeong-Chan Lee, Huixiong Dai, Tejinder Singh, Joung Joo Lee | 2021-02-23 |