Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201078 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Jallepally Ravi, Hiroyuki Takahama | 2021-12-14 |
| D933725 | Deposition ring for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2021-10-19 |
| 11043406 | Two piece shutter disk assembly with self-centering feature | Ananthkrishna Jupudi, Sarath Babu | 2021-06-22 |
| 11031273 | Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes | Bonnie T. Chia, Ross Marshall, Tomoharu Matsushita | 2021-06-08 |
| 11011676 | PVD buffer layers for LED fabrication | Mingwei Zhu, Rongjun Wang, Nag B. Patibandla, Xianmin Tang, Vivek Agrawal +5 more | 2021-05-18 |
| 10950475 | Method and apparatus for processing a substrate using non-contact temperature measurement | Vinodh Ramachandran, Ananthkrishna Jupudi, Yueh Sheng Ow, Preetham Rao, Ribhu Gautam +1 more | 2021-03-16 |
| 10892180 | Lift pin assembly | Bonnie T. Chia, Jallepally Ravi, Manjunatha Koppa, Vinod Konda Purathe, Aravind Kamath | 2021-01-12 |