Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171017 | Shutter disk | Zhang Kang, Junqi Wei, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2021-11-09 |
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-09-21 |
| 11114288 | Physical vapor deposition apparatus | Kirankumar Neelasandra SAVANDAIAH, Junqi Wei, Wen Long Favier Shoo | 2021-09-07 |
| 10991617 | Methods and apparatus for cleaving of semiconductor substrates | Felix Deng, Tuck Foong Koh, Nuno Yen-Chu Chen, Yuichi Wada, Sree Rangasai V. Kesapragada +1 more | 2021-04-27 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-03-23 |
| 10950475 | Method and apparatus for processing a substrate using non-contact temperature measurement | Vinodh Ramachandran, Ananthkrishna Jupudi, Cheng-Hsiung Tsai, Preetham Rao, Ribhu Gautam +1 more | 2021-03-16 |