Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11171017 | Shutter disk | Zhang Kang, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2021-11-09 | $68,627,000 |
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-09-21 | |
| 11114288 | Physical vapor deposition apparatus | Kirankumar Neelasandra SAVANDAIAH, Yueh Sheng Ow, Wen Long Favier Shoo | 2021-09-07 | $49,370,000 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-03-23 |