Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171017 | Shutter disk | Zhang Kang, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2021-11-09 |
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-09-21 |
| 11114288 | Physical vapor deposition apparatus | Kirankumar Neelasandra SAVANDAIAH, Yueh Sheng Ow, Wen Long Favier Shoo | 2021-09-07 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-03-23 |