Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171017 | Shutter disk | Zhang Kang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-11-09 |
| D931241 | Lower shield for a substrate processing chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-09-21 |
| 11043406 | Two piece shutter disk assembly with self-centering feature | Cheng-Hsiung Tsai, Ananthkrishna Jupudi | 2021-06-22 |
| D913979 | Inner shield for a substrate processing chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-03-23 |