Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171017 | Shutter disk | Zhang Kang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-11-09 |
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-09-21 |
| 11043406 | Two piece shutter disk assembly with self-centering feature | Cheng-Hsiung Tsai, Sarath Babu | 2021-06-22 |
| 10971383 | Fluorescence based thermometry for packaging applications | Preetham Rao | 2021-04-06 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-03-23 |
| 10950475 | Method and apparatus for processing a substrate using non-contact temperature measurement | Vinodh Ramachandran, Cheng-Hsiung Tsai, Yueh Sheng Ow, Preetham Rao, Ribhu Gautam +1 more | 2021-03-16 |
| 10945313 | Methods and apparatus for a microwave batch curing process | Saket Rathi, Mukund Sundararajan, Manjunath H. Venkataswamappa | 2021-03-09 |