Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D933725 | Deposition ring for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Steven V. Sansoni, David T. Or | 2021-10-19 |
| 10945313 | Methods and apparatus for a microwave batch curing process | Saket Rathi, Ananthkrishna Jupudi, Mukund Sundararajan | 2021-03-09 |