Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201078 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Jallepally Ravi, Cheng-Hsiung Tsai, Hiroyuki Takahama | 2021-12-14 |
| D933725 | Deposition ring for a substrate processing chamber | Manjunatha Koppa, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2021-10-19 |
| 10892180 | Lift pin assembly | Bonnie T. Chia, Jallepally Ravi, Manjunatha Koppa, Vinod Konda Purathe, Cheng-Hsiung Tsai | 2021-01-12 |