Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201078 | Substrate position calibration for substrate supports in substrate processing systems | Aravind Kamath, Jallepally Ravi, Cheng-Hsiung Tsai, Hiroyuki Takahama | 2021-12-14 |
| 11031273 | Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes | Bonnie T. Chia, Ross Marshall, Cheng-Hsiung Tsai | 2021-06-08 |