Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031273 | Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes | Bonnie T. Chia, Tomoharu Matsushita, Cheng-Hsiung Tsai | 2021-06-08 |
RM
Ross Marshall
Overall (2021): #283,415 of 548,734Top 55%
1
Patents 2021