Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo +5 more | 2021-11-09 | $68,627,000 |
| 11021794 | Graphite susceptor | Subramani Iyer, Kartik Shah, Mehran Behdjat | 2021-06-01 | $74,932,000 |
| 10971383 | Fluorescence based thermometry for packaging applications | Ananthkrishna Jupudi | 2021-04-06 | $63,491,000 |
| 10950475 | Method and apparatus for processing a substrate using non-contact temperature measurement | Vinodh Ramachandran, Ananthkrishna Jupudi, Cheng-Hsiung Tsai, Yueh Sheng Ow, Ribhu Gautam +1 more | 2021-03-16 | $56,717,000 |