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Home › 2021 › Applied Materials › Schubert S. Chu

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Schubert S. Chu — 13 Patents in 2021

Applied Materials: 13 patents #8 of 1,395Top 1%

San Francisco, CA: #67 of 7,035 inventorsTop 1%

California: #733 of 66,859 inventorsTop 2%

Overall (2021): #4,549 of 548,734Top 1%

13 Patents 2021

Issued Patents 2021

Showing 1–13 of 13 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
11189508	Purged viewport for quartz dome in epitaxy reactor	Ji-Dih HU, Brian H. Burrows, Janardhan Devrajan	2021-11-30	$50,552,000
11177144	Wafer spot heating with beam width modulation	Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Koji Nakanishi, Toshiyuki Nakagawa +1 more	2021-11-16	$84,921,000
11171023	Diode laser for wafer heating for EPI processes	Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo, Preetham Rao +5 more	2021-11-09	$68,627,000
11164767	Integrated system for semiconductor process	Xinyu BAO, Hua Chung	2021-11-02	$95,673,000
11164737	Integrated epitaxy and preclean system	Lara Hawrylchak, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo	2021-11-02	$95,673,000
11152221	Methods and apparatus for metal silicide deposition	Xuebin Li, Wei Liu, Gaurav Thareja, Shashank Sharma, Patricia M. Liu	2021-10-19	$109,516,000
11124874	Methods for depositing metallic iridium and iridium silicide	Hua Chung, Feng Q. Liu	2021-09-21	$69,558,000
11057963	Lamp infrared radiation profile control by lamp filament design and positioning	Zhepeng CONG	2021-07-06	$60,527,000
11049719	Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal	Lara Hawrylchak, Kin Pong Lo, Errol C. Sanchez, Tushar Mandrekar	2021-06-29	$47,858,000
11037838	In-situ integrated chambers	Xuebin Li, Errol Antonio C. Sanchez, Patricia M. Liu, Gaurav Thareja, Raymond Hung	2021-06-15	$88,912,000
11021795	Multi zone spot heating in epi	Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more	2021-06-01	$74,932,000
11021790	Liner for processing chamber	Zhepeng CONG, Nyi O. Myo, Kartik Shah, Surajit Kumar	2021-06-01	$74,932,000
10930543	Thermal processing susceptor	Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more	2021-02-23	$34,793,000