Issued Patents 2021
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189508 | Purged viewport for quartz dome in epitaxy reactor | Ji-Dih HU, Brian H. Burrows, Janardhan Devrajan | 2021-11-30 |
| 11177144 | Wafer spot heating with beam width modulation | Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Koji Nakanishi, Toshiyuki Nakagawa +1 more | 2021-11-16 |
| 11171023 | Diode laser for wafer heating for EPI processes | Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo, Preetham Rao +5 more | 2021-11-09 |
| 11164767 | Integrated system for semiconductor process | Xinyu BAO, Hua Chung | 2021-11-02 |
| 11164737 | Integrated epitaxy and preclean system | Lara Hawrylchak, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo | 2021-11-02 |
| 11152221 | Methods and apparatus for metal silicide deposition | Xuebin Li, Wei Liu, Gaurav Thareja, Shashank Sharma, Patricia M. Liu | 2021-10-19 |
| 11124874 | Methods for depositing metallic iridium and iridium silicide | Hua Chung, Feng Q. Liu | 2021-09-21 |
| 11057963 | Lamp infrared radiation profile control by lamp filament design and positioning | Zhepeng CONG | 2021-07-06 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Lara Hawrylchak, Kin Pong Lo, Errol C. Sanchez, Tushar Mandrekar | 2021-06-29 |
| 11037838 | In-situ integrated chambers | Xuebin Li, Errol Antonio C. Sanchez, Patricia M. Liu, Gaurav Thareja, Raymond Hung | 2021-06-15 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2021-06-01 |
| 11021790 | Liner for processing chamber | Zhepeng CONG, Nyi O. Myo, Kartik Shah, Surajit Kumar | 2021-06-01 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |