Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209398 | High quality factor embedded resonator wafers | Chuang-Chia Lin, Upendra Ummethala | 2021-12-28 |
| 11021790 | Liner for processing chamber | Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah | 2021-06-01 |