Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209398 | High quality factor embedded resonator wafers | Chuang-Chia Lin, Surajit Kumar | 2021-12-28 |
| 11114286 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Steven E. Babayan, Lei Lian | 2021-09-07 |
| 11009538 | Micro resonator array system | Chuang-Chia Lin, Andrew Kunil Choe | 2021-05-18 |
| 10901021 | Method for detecting wafer processing parameters with micro resonator array sensors | Chuang-Chia Lin | 2021-01-26 |