Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114286 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Lei Lian | 2021-09-07 |
| 11075105 | In-situ apparatus for semiconductor process module | Yogananda Sarode Vishwanath, Stephen Prouty, Andreas Schmid | 2021-07-27 |
| 10964584 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Douglas R. McAllister +3 more | 2021-03-30 |