Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075105 | In-situ apparatus for semiconductor process module | Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid | 2021-07-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075105 | In-situ apparatus for semiconductor process module | Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid | 2021-07-27 |