Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11075105 | In-situ apparatus for semiconductor process module | Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid | 2021-07-27 | $132,720,000 |
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Skip to contentShowing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11075105 | In-situ apparatus for semiconductor process module | Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid | 2021-07-27 | $132,720,000 |