Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201037 | Process kit with adjustable tuning ring for edge uniformity control | — | 2021-12-14 |
| 11075105 | In-situ apparatus for semiconductor process module | Steven E. Babayan, Stephen Prouty, Andreas Schmid | 2021-07-27 |
| 11004722 | Lift pin assembly | Anand KUMAR | 2021-05-11 |